Carbon tetrafluoride CF4
Specialty Gases 2025-04-23
Product Introduction:
Chinese name: Carbon tetrafluoride
Foreign name: Carbon tetrafluoride R14
Other name: Tetrafluoromethane, Perfluoromethane
Chemical formula: CF4
Packaging: 8L/10L/40L/47L
Purity: 3N/4N/5N
CAS registration number: 75-73-0
EINECS registration number: 200-896-5
Melting point: -184 ℃
Boiling point: -130 ℃
Water solubility: Insoluble
Appearance: Colorless gas
Carbon tetrafluoride is mainly used in plasma etching processes of various integrated circuits, and is also used as laser gas, low-temperature refrigerant, solvent, lubricant, insulating material, and coolant for infrared detector tubes.
Technical parameters:
| Purity % | 99.9 | 99.999 |
| Oxygen | ≤100ppmv | ≤1.0ppmv |
| Nitrogen | ≤400ppmv | ≤4.0ppmv |
| Carbon dioxide | ≤80ppmv | ≤0.5ppmv |
| Carbon monoxide | ≤50ppmv | ≤0.5ppmv |
| Methane | ≤50ppmv | ≤0.5ppmv |
| Gas hydrocarbons | ≤100ppmv | ≤2.0ppmv |
| Water | ≤10ppmv | ≤2.0ppmv |
| Sulfur hexafluoride | ≤15ppmv | ≤1.0ppmv |
| Acidity as HF | ≤1.0ppmv | ≤0.1ppmv |
